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US 2026/0163330 A1Published application
Optical element and manufacturing method having a reverse mesa ridge structure
OwnerJeong Soo KIMinventor
Life of this patent
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Abstract
Provided is an optical element having a reverse mesa ridge structure in which an electric pad is disposed on top of a benzocyclobutene (BCB) material disposed on one side of the reverse mesa ridge, and the semiconductor ridge and the BCB layer may be spaced apart from each other to have a space therebetween.
Claims12
An optical element having a reverse mesa ridge structure, the element comprising:
- a substrate;
- a second cladding layer disposed near a center of the top of the substrate;
- a first benzocyclobutene (BCB) layer disposed on a right side of the second cladding layer and spaced apart from the second cladding layer to have a space therebetween;
- a second BCB layer disposed on a left side of the second cladding layer and spaced apart from the second cladding layer to have a space therebetween;
- a light source electrode connecting the top of the second cladding layer to the top of the second BCB layer;
- an insulating film connecting the top of the light source electrode to the top of the first BCB layer;
- and
- a heater disposed on top of the insulating film connecting the top of the light source electrode to the top of the first BCB layer.
5 more elements
A manufacturing method of an optical element having a reverse mesa ridge structure, the method comprising:
- disposing a second cladding layer near a center of the top of a substrate;
- disposing a benzocyclobutene (BCB) layer on each of two sides of the second cladding layer disposed on top of the substrate;
- disposing a first BCB layer on a right side of the second cladding layer to be spaced apart from the second cladding layer and a second BCB layer on a left side of the second cladding layer to be spaced apart from the second cladding layer by removing portions of the BCB layers disposed on the two sides of the second cladding layer;
- applying a photoresist (PR) to the removed BCB layer and filling the removed BCB layer with the photoresist (PR);
- disposing a light source electrode to connect the top of the second cladding layer to the top of the second BCB layer;
- disposing an insulating film to connect the top of the light source electrode to the top of the first BCB layer;
- disposing a heater on top of the insulating film connecting the top of the light source electrode to the top of the first BCB layer;
- and
- providing an air bridge structure by removing the photoresist (PR) disposed between the second cladding layer and the first BCB layer and between the second cladding layer and the second BCB layer.
6 more elements
Dependencies are inferred from the claim text.