Tilt measurement in particle microscope systems

Abstract

A particle microscope system comprises: a vacuum chamber; a sample holder having a holding surface which extends in a plane of the vacuum chamber and on which a sample can be arranged; a source column disposed in the vacuum chamber and configured to shape and scan a primary particle beam; a laser light source configured to emit laser light towards the holding surface along a beam path; and an autocollimator detection system arranged in the beam path downstream of the holding surface in a propagation direction of the laser light. The autocollimator is configured to output a signal which is selectively sensitive to a tilt of a reflector in the beam path at the holding surface. A projection of the beam path on the holding surface defines a measurement region. A central axis of the source column intersects the measurement region.

Dependencies are inferred from the claim text.