Nanostructure platform for cellular interfacing and corresponding manufacturing method.
AssigneeCentre National de la Recherche Scientifique (CNRS)
InventorGuilhem LARRIEU
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Abstract
The invention relates to a platform for cellular interfacing, comprising at least one nanoprobe based on vertical nanowires each comprising a conductive end intended to come into contact with a cell, wherein the platform comprises: a transparent bulk substrate or a passivation layer of a CMOS electronic circuit on which the vertical nanowires are structured; an active conductive layer on the structured bulk substrate; access lines for accessing said nanowires; an insulating layer partially covering the platform, the insulating layer being selectively removed the at the nanowires of one or more nanosensors.
Claims7
A platform for cellular interfacing, comprising at least one nanoprobe based on vertical nanowires each comprising a conductive end intended to come into contact with a cell, wherein said platform comprises:
- a transparent bulk substrate or a passivation layer of a CMOS electronic circuit on which the vertical nanowires are structured;
- an active conductive layer on said structured bulk substrate;
- access lines for accessing said nanowires;
- an insulating layer partially covering said platform, said insulating layer being selectively removed the at the nanowires of one or more nanosensors.
A microprocessor comprising a platform for cellular interfacing, said platform comprising at least one nanoprobe based on vertical nanowires each comprising a conductive end intended to come into contact with a cell, said platform comprising:
- a transparent bulk substrate or a passivation layer of a CMOS electronic circuit on which the vertical nanowires are structured;
- an active conductive layer on said structured bulk substrate;
- access lines for accessing said vertical nanowires;
- an insulating layer partially covering said platform, said insulating layer being selectively removed the at the nanowires of one or more nanosensors;
- wherein said vertical nanowires are directly built over a passivation layer of the microprocessor.
A platform for cellular interfacing, comprising at least one nanoprobe based on vertical nanowires each comprising a conductive end portion configured to contact a cell, wherein the platform is manufactured according to a sequence of steps including:
- (a) creating vertical nanowires over a predetermined bulk substrate;
- (b) depositing a silicon layer;
- (c) creating access lines for accessing the nanowires;
- (d) selectively siliciding the access lines and the nanowires;
- (e) metal structuring the access lines;
- (f) depositing an insulating layer for liquid measurement;
- and
- (g) selectively removing the insulating layer on the nanoprobes.
Dependencies are inferred from the claim text.