Gas sensor
AssigneeTDK Corporation
InventorYoshio KAITA
Life of this patent
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Abstract
Disclosed herein is a gas sensor that includes: a substrate having a first cavity; a first heater supported on the substrate so as to overlap the first cavity; a first temperature-sensitive element supported on the substrate so as not to overlap the first heater; and a signal processing circuit configured to heat the first heater during gas concentration measurement. A temperature of the first temperature-sensitive element during the gas concentration measurement changes due to heat conducted from the first heater, mainly through the substrate, and in accordance with a change in a temperature of the first heater.
Claims14
A gas sensor comprising:
- a substrate having a first cavity;
- a first heater supported on the substrate so as to overlap the first cavity;
- a first temperature-sensitive element supported on the substrate so as not to overlap the first heater;
- and
- a signal processing circuit configured to heat the first heater during gas concentration measurement,
- wherein a temperature of the first temperature-sensitive element during the gas concentration measurement changes due to heat conducted from the first heater, mainly through the substrate, and in accordance with a change in a temperature of the first heater.
Dependencies are inferred from the claim text.