Back to results
US 2026/0160699 A1Published application
Inspection equipment and inspection method
AssigneeSamsung Display Co., Ltd.
InventorsNURI JUNG, MINCHAN PARK, MOONHYUK KIM, HYEJIN LEE, DAEKI PARK, SEUNGWOOK LEE, HO-YOUN CHO
Life of this patent
Estimating the term…
Abstract
An inspection apparatus includes a lighting unit which radiates light onto a surface of a target panel by adjusting an angle, an imaging unit which captures an image of an area of the target panel irradiated with the light by the lighting unit, a first transferring unit which moves the lighting unit at above the target panel, and a second transferring unit which moves the imaging unit above the target panel.
Claims20
An inspection apparatus comprising:
- a lighting unit which irradiates light onto a surface of a target panel by adjusting an angle;
- an imaging unit which captures an image of an area of the target panel irradiated with the light by the lighting unit;
- a first transferring unit which moves the lighting unit above the target panel;
- and
- a second transferring unit which moves the imaging unit above the target panel.
2 more elements
An inspection method comprising:
- disposing a target panel at an inspection point;
- radiating light onto a surface of the target panel by adjusting an angle of light irradiation;
- and
- capturing an image of an area of the target panel irradiated with the light,
- wherein, in the radiating the light, the angle of light irradiation is adjusted in a way such that reflection from a surface scratch on the target panel is reduced.
2 more elements
Dependencies are inferred from the claim text.