Optical probe, optical probe array, and probe system
AssigneeKabushiki Kaisha Nihon Micronics
InventorMichitaka OKUTA
Life of this patent
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Abstract
An optical probe for transmitting an optical signal to, and receiving an optical signal from, an optical device, includes: a tip surface that is a convex curved surface and faces the optical device; an optical waveguide that is a refractive index distribution type and has a first end part connected to the tip surface; and a base end surface to which a second end part of the optical waveguide is connected.
Claims11
An optical probe for transmitting an optical signal to, and receiving an optical signal from, an optical device, comprising:
- a tip surface that is a convex curved surface and faces the optical device;
- an optical waveguide that is a refractive index distribution type and has a first end part connected to the tip surface;
- and
- a base end surface to which a second end part of the optical waveguide is connected.
An optical probe array configured by arranging a plurality of optical probes, wherein
- an optical probe of the plurality of optical probes is configured to transmit an optical signal to, and receiving an optical signal from, an optical device,
- the optical probe comprises:
- a tip surface that is a convex curved surface and faces the optical device;
- an optical waveguide that is a refractive index distribution type and has a first end part connected to the tip surface;
- and
- a base end surface to which a second end part of the optical waveguide is connected.
A measurement system, comprising:
- an optical probe for transmitting an optical signal to, and receiving an optical signal from, an optical device, comprising:
- a tip surface that is a convex curved surface and faces the optical device;
- an optical waveguide that is a refractive index distribution type and has a first end part connected to the tip surface;
- and a base end surface to which a second end part of the optical waveguide is connected;
- a probe head that holds the optical probe;
- and
- a moving device that moves the probe head in order to align the tip surface of the optical probe with the optical device.
Dependencies are inferred from the claim text.