Liquid-phase deposition of thin films
AssigneeCoreshell Technologies, Incorporated
InventorsSourav Roger Basu, Jonathan Tan, Bonil Koo
Life of this patent
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Abstract
Methods, systems, and compositions for the liquid-phase deposition (LPD) of thin films. The thin films can be coated onto the surface of components of electrochemical devices, such as current collectors. Embodiments of the present disclosure achieve a faster, safer, and more cost-effective means for forming uniform, conformal layers on non-planar microstructures than known methods. In one aspect, the methods and systems involve exposing the component to be coated to different liquid reagents in sequential processing steps, with optional intervening rinsing and drying steps. Processing may occur in a single reaction chamber or multiple reaction chambers.
Claims38
A method for coating a thin film onto a surface of a current collector, comprising:
- providing a current collector onto a conveyance apparatus;
- transferring, by the conveyance apparatus, the current collector to a first reaction chamber comprising at least a first liquid solution comprising a first reagent;
- exposing, by the conveyance apparatus, the current collector to the first liquid solution to produce a partially coated current collector having a layer comprising an adsorbed first reagent on the surface of the current collector;
- (d) transferring, by the conveyance apparatus, the partially coated current collector to a second reaction chamber comprising a second liquid solution comprising at least a second reagent;
- and
- (e) exposing, by the conveyance apparatus, the partially coated current collector to the second liquid solution, wherein the at least second reagent reacts with the first-adsorbed first reagent of the partially coated current collector to produce a fully coated current collector comprising a monolayer of thin film coated onto the surface of the fully coated current collector, the monolayer of thin film comprising a compound generated from the reaction of the second reagent and the adsorbed first reagent.
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A system for coating a thin film onto a current collector, comprising:
- a conveyance apparatus for conveying the current collector to:
- (a) a first reaction chamber where the current collector is exposed to a first liquid solution comprising at least a first reagent to produce a layer comprising an adsorbed first reagent on the current collector;
- and
- (b) a second reaction chamber where the current collector having a layer comprising the adsorbed first reagent is exposed to a second liquid solution comprising at least a second reagent, wherein the at least second reagent reacts with the adsorbed first reagent to produce the thin film on a surface of the current collector.
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Dependencies are inferred from the claim text.