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US 2026/0159530 A1Published application
Strontium compound, method of manufacturing thin film containing strontium and semiconductor device using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJong Won CHOI, Dmitry KRAVCHUK, YONGSUK CHO, Kijung Jung, Joonghee Won, Chul BAIK, Hwea Yoon KIM, Seung-Yeon KWAK, Jung Im HAN, Tae Jin CHOI, YOUNGJAE PARK
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Abstract
A strontium compound, a method of making a thin film with the strontium compound, and a method of manufacturing a semiconductor device including the thin film. The strontium compound is represented by Chemical Formula 1: In Chemical Formula 1, n, L1, L2, A, and m are as defined herein.
Claims20
A strontium compound represented by Chemical Formula 1:
- In Chemical Formula 1,
- L1 is a first ligand represented by Chemical Formula 2,
- L2 is a second ligand different from the first ligand,
- A is an third ligand including oxygen or nitrogen,
- n is 1 or 2, and
- m is 0, 1, 2, 3, or 4,
- In Chemical Formula 2, X is nitrogen or CR, where R of CR is hydrogen or a substituted or unsubstituted C1 to C10 alkyl group,
- * denotes hydrogen or a binding site to strontium,
- 1 is 1 or 2,
- each n2 is independently 1, 2, or 3,
- each Y1 is independently O or NR, where R of NR is hydrogen or a substituted or unsubstituted C1 to C10 alkyl group, and
- 1 and R2 are each independently a substituted or unsubstituted C1 to C5 alkyl group or a Si-containing organic group.
9 more elements
Dependencies are inferred from the claim text.