Mems contact switch
OwnerChristoph Schellinginventor
Life of this patent
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Abstract
A MEMS contact switch. The MEMS contact switch includes a substrate, and a micromechanical switching element, which is movably suspended above the substrate. The micromechanical switching element includes a first subelement and a second subelement. The first subelement is suspended using a first suspension spring, and the second subelement is suspended on the first subelement using a second suspension spring. A first electrically conductive contact surface is disposed on the second subelement and a second electrically conductive contact surface is disposed on an opposite surface above the substrate with a gap-like spacing. A first capacitive control electrode is disposed on the surface above the substrate. A second capacitive control electrode is disposed on the surface above the substrate.
Claims17
A MEMS contact switch, comprising:
- a substrate with a main extension plane;
- a micromechanical switching element which is movably suspended above the substrate, wherein the micromechanical switching element includes a first subelement and a second subelement, wherein the first subelement is suspended using at least one first suspension spring, wherein the second subelement is suspended on the first subelement using at least one second suspension spring, wherein at least one first electrically conductive contact surface is disposed on the second subelement and at least one second electrically conductive contact surface is disposed on an opposite surface above the substrate with a gap-like spacing;
- a first capacitive control electrode, which is disposed on the opposite surface above the substrate and is configured to deflect the first subelement of the movable element in a first direction perpendicular to the main extension plane of the substrate by a first travel distance;
- and
- a second capacitive control electrode, which is disposed on the opposite surface above the substrate and is configured to deflect the second subelement of the movable element in the first direction by a second travel distance, so that the first contact surface and the second contact surface create an electrically conductive contact.
A method for actuating a MEMS contact switch, the MEMS contact switch including:
- a substrate with a main extension plane,
- a micromechanical switching element which is movably suspended above the substrate, wherein the micromechanical switching element includes a first subelement and a second subelement, wherein the first subelement is suspended using at least one first suspension spring, wherein the second subelement is suspended on the first subelement using at least one second suspension spring, wherein at least one first electrically conductive contact surface is disposed on the second subelement and at least one second electrically conductive contact surface is disposed on an opposite surface above the substrate with a gap-like spacing,
- a first capacitive control electrode, which is disposed on the opposite surface above the substrate and is configured to deflect the first subelement of the movable element in a first direction perpendicular to the main extension plane of the substrate by a first travel distance, and
- a second capacitive control electrode, which is disposed on the opposite surface above the substrate and is configured to deflect the second subelement of the movable element in the first direction by a second travel distance, so that the first contact surface and the second contact surface create an electrically conductive contact
- the method comprising the following steps:
- (A) applying a first control voltage to the first control electrode at a first point in time to deflect the first subelement in the first direction;
- and
- (B) applying a second control voltage to the second control electrode at a second point in time to deflect the second subelement in the first direction, so that the first contact surface and at least the second contact surface create an electrically conductive contact.
Dependencies are inferred from the claim text.