Container for semiconductor wafers with soft landings and safe storage

Abstract

One or more bracket structures within a workpiece container configured to, in operation, receive one or more workpieces (e.g., unprocessed wafers, partially processed wafers, wafer assemblies, etc.). Each respective bracket structure of the one or more bracket structures includes a plurality of recesses configured to, in operation, receive the one or more workpieces. At least one of the recesses of each of the respective bracket structures is partially lined with a soft material, which may be an elastic material. The soft material acts as a bumper or support to prevent mechanical defects (e.g., scratching, micro-cracking, cracking, or some other similar or like mechanical defect) from propagating at, along, or within the workpiece when present within the respective recesses lined with the soft material.

Dependencies are inferred from the claim text.