Antenna-effect electrostatic discharge detection circuit and method for measuring antenna-effect electrostatic discharging quantity
AssigneeMediatek Inc.
InventorsChun-Cheng HSU, Yan-Liang JI
Life of this patent
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Abstract
An antenna-effect electrostatic discharge (ESD) detection circuit and a method for measuring the antenna-effect ESD quantity are provided. The antenna-effect ESD detection circuit includes a first antenna-effect ESD detection device and a first ESD protection device. The first antenna-effect ESD detection device is coupled between a first pad and a second pad. The first ESD protection device is coupled between an I/O pad and the first pad. The internal circuit is coupled to the I/O pad, the first external ESD protection device, and the first antenna-effect ESD detection device.
Claims20
An antenna-effect electrostatic discharge (ESD) detection circuit, comprising:
- a first antenna-effect ESD detection device coupled between a first pad and a second pad;
- and
- a first external electrostatic discharge (ESD) protection device coupled between an input/output (I/O) pad and the first pad,
- wherein the internal circuit is coupled to the I/O pad, the first external ESD protection device, and the first antenna-effect ESD detection device.
A method for measuring antenna-effect effect electrostatic discharge (ESD) quantity, comprising:
- fabricating a chip surrounded by a scribe line on a semiconductor wafer, wherein the chip comprises an antenna-effect ESD detection circuit for an internal circuit, wherein the antenna-effect ESD detection circuit comprises:
- an antenna-effect ESD detection device coupled between a first pad and a second pad;
- and
- an external ESD protection device coupled between an I/O pad and the first pad,
- wherein the internal circuit is coupled to the I/O pad, the external ESD protection device, and the antenna-effect ESD detection device, and a drain of the antenna-effect ESD detection device is connected to an antenna structure;
- obtaining a first threshold voltage of the antenna-effect ESD detection device of the chip;
- and
- removing charges trapped in a floating gate of the antenna-effect ESD detection device.
Dependencies are inferred from the claim text.