Particle-optical arrangement, for example multi-beam particle microscope, with a magnet arrangement for separating a primary and a secondary particle-optical beam path with improved performance

A particle-optical arrangement, comprising:

• a multi-beam particle generator configured to provide a plurality of first individual particle beams, the particle-optical arrangement configured to provide a primary particle-optical beam path for the plurality of first individual particle beams to an object plane of the multi-particle arrangement, and the particle-optical arrangement configured to provide a secondary particle-optical beam path for a plurality of second individual particle beams emanating from the object plane;
• and
• a magnet arrangement configured to provide:
• a first magnetic field region through which the primary and secondary particle-optical beam paths pass to separate the first magnetic field region configured to separate the primary and secondary particle-optical beam paths from each other;
• and
• a second magnetic field region in the primary particle-optical beam path and not in the secondary particle-optical beam path,
• wherein:
• the second magnetic field region is upstream of the first magnetic field region along the primary particle-optical beam path;
• the first magnetic field region and the second magnetic field region configured to deflect the primary particle-optical beam path in different directions;
• for each of the first and second magnetic field regions, the magnetic field region comprises an entrance region for the primary particle-optical beam path with an entrance inclination, the entrance inclination being an angle by which an alignment of the entrance region deviates from a normal to a particle-optical axis of the primary particle-optical beam path;
• for each of the first and second magnetic field regions, the magnetic field region comprises an exit region for the primary particle-optical beam path with an exit inclination, the exit inclination being an angle by which an alignment of the exit region deviates from the normal to the particle-optical axis of the primary particle-optical beam path;
• and
• the exit inclination of the first magnetic field region deviates from 0°.