Electron-optical element
AssigneeASML Netherlands B.V.
InventorsJohan Joost KONING, Laura DEL TIN
Life of this patent
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Abstract
A charged particle-optical element for a charged particle-optical module configured to direct charged particles along at least one beam path, the charged particle-optical element comprising: a substrate comprising at least one aperture for passage therethrough of the at least one beam path; at least one electronic component so as to provide a component surface of the substrate; and an electrical connector electrically connected to the at least one electronic component and extending through the substrate; wherein the substrate comprises a thicker portion and a thinner portion that is thinner than the thicker portion, and the electrical connector extends through the thinner portion.
Claims15
A charged particle-optical element for a charged particle-optical module configured to direct charged particles along at least one beam path, the charged particle-optical element comprising:
- a substrate comprising at least one aperture for passage therethrough of the at least one beam path;
- at least one electronic component so as to provide a component surface of the substrate;
- and
- an electrical connector electrically connected to the at least one electronic component and extending through the substrate;
- wherein the substrate comprises a thicker portion and a thinner portion that is thinner than the thicker portion, and the electrical connector extends through the thinner portion.
Dependencies are inferred from the claim text.