Structure Estimation System and Structure Estimation Program for Estimating Height of Structure Based on Data from Charged Particle Beam Device

A structure estimation system that estimates, by one or more computer systems, from an observation image of a sample acquired by one or more devices, an effect of a foreign object on a first layer of the sample on a second layer formed on the first layer,

• wherein the structure estimation system includes the one or more computer systems,
• wherein the one or more computer systems include a non-volatile storage medium storing a plurality of modules for performing one or more implemented functions, including at least one computing module,
• wherein the one or more computer systems include one or more identifiers,
• wherein the one or more identifiers are configured to receive, as an input, a first observation image of the first layer on which the foreign object is located or a first feature amount extracted from the first observation image, and are configured to output a second observation image of the second layer formed on the first layer or a second feature amount extracted from the second observation image, and
• wherein the one computing module inputs the first observation image or the first feature amount to the one or more identifiers to acquire the second observation image or the second feature amount.