Force sensor device

Abstract

A force sensor device includes a first stage, a second stage disposed behind the first stage with a gap therebetween, a plurality of beams fixed to the second stage and the first stage, and strain gauges attached on the plurality of beams. The first stage is configured to move relatively to the second stage in response to a force applied from the front. The plurality of fixed beams are configured to deform with the movement of the first stage. Each of the plurality of beams includes a decreasing region where at least either the width or the thickness monotonically decreases from a first fixing point to one of the first stage and the second stage toward a second fixing point to the other one of the first stage and the second stage. Each strain gauge is attached within the decreasing region.

Dependencies are inferred from the claim text.