Method and Device for Measuring a Voltage

A method for measuring a voltage by means of a micro-electro-mechanical system (MEMS) comprising a sample mass which is mounted above a substrate by a plurality of mechanical spring elements such that the sample mass can be moved relative to the substrate along a direction of vibration, a plurality of trim electrodes configured to generate an electrostatic force on the sample mass under an applied voltage, the electrostatic force counteracting a mechanical spring force generated by the mechanical spring elements when the sample mass is deflected along the direction of vibration, a plurality of drive electrodes configured to set the sample mass in motion along the direction of vibration, and a plurality of readout electrodes configured to measure a vibration frequency of the vibration of the sample mass, the method comprising:

• applying a voltage to be measured to the trim electrodes, wherein the voltage to be measured is a reference voltage having a magnitude which is a basis for further measurement and/or calculation operations;
• measuring the reference voltage from a measured vibration frequency of the sample mass;
• detecting changes in the reference voltage based on a change in the measured vibration frequency;
• and
• correcting the further measurement and/or calculation operations by replacing the reference voltage with the measured reference voltage.