High-pressure sensor with an aluminum oxide layer

Abstract

A high-pressure sensor. The high-pressure sensor includes: a substrate; a membrane, which is deflectable into a free region along a normal direction depending on an ambient pressure; measuring devices, which are applied above the membrane in the normal direction and each has at least one measuring device layer for electrically detecting the membrane deflection; and an insulating layer arranged at least on the membrane. A homogeneous aluminum oxide layer is arranged at least between the measuring device layer and the insulating layer.

Dependencies are inferred from the claim text.