Window cavity wafers
AssigneeMaterion Corporation
InventorsReto KELLER, Richard KOBA
Life of this patent
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Abstract
Techniques and/or systems are disclosed herein for forming a window cavity wafer that includes fabricating a window wafer by: providing a window wafer substrate having two faces; etching fiducials onto one or more faces of the window wafer substrate; and applying one or more optical coatings to on one or more faces of the window wafer substrate. Next, fabricating a spacer wafer separate from the window wafer by: providing a spacer wafer substrate having two faces; and forming an array of through-holes in the spacer wafer substrate. Then, bonding the spacer wafer to the window wafer to form the window cavity wafer; and forming discrete metal frames on a face of the window cavity wafer.
Claims24
A window cavity wafer, comprising:
- a window wafer including a window wafer substrate and one or more optical coatings disposed on one or more faces of the window wafer substrate;
- and
- a spacer wafer including a spacer wafer substrate,
- wherein the spacer wafer is wafer bonded to the window wafer to form the window cavity wafer, and wherein the window cavity wafer includes metal frames.
(canceled)
8-9. (canceled)
A method for forming a window cavity wafer, comprising:
- fabricating a window wafer by:
- providing a window wafer substrate having two faces;
- etching one or more faces of the window wafer substrate;
- and
- applying one or more optical coatings to on one or more faces of the window wafer substrate;
- fabricating a spacer wafer separate from the window wafer by:
- providing a spacer wafer substrate having two faces;
- and
- forming an array of through-holes in the spacer wafer substrate;
- bonding the spacer wafer to the window wafer to form the window cavity wafer;
- and
- forming discrete metal frames on a face of the window cavity wafer.
(canceled)
22-24. (canceled)
A method for forming a window cavity wafer, comprising:
- fabricating a window wafer by:
- providing a window wafer substrate having two faces;
- etching one or more faces of the window wafer substrate;
- and
- applying one or more optical coatings to on one or more faces of the window wafer substrate;
- fabricating a spacer wafer separate from the window wafer by:
- providing a spacer wafer substrate having two faces;
- and
- forming cavities on the faces of the spacer wafer substrate;
- bonding the spacer wafer to the window wafer to form the window cavity wafer;
- and
- forming discrete metal frames on a face of the window cavity wafer.
Dependencies are inferred from the claim text.