Precursors comprising an enaminolate ligand
AssigneeASM IP Holding B.V.
InventorsCharles Dezelah, Patricio Eduardo Romero
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Abstract
The present invention relates to compositions, precursor vessels, methods and systems for depositing metals from group 4, group 5, group 6 or group 13, as well as methods for synthesizing metal precursors. Compositions of the present invention comprise a coordination compound comprising a metal from group 5, group 6 or group 13, and at least one enaminolate ligand.
Claims20
A composition comprising a coordination compound comprising:
- a metal from group 5, group 6 or group 13, and
- at least one enaminolate ligand.
A method for depositing a material comprising a metal from group 4, group 5, group 6 or group 13 on a substrate, the method comprising:
- providing a substrate in a reaction chamber, and then
- providing, into the reaction chamber, a vapor-phase composition comprising a precursor comprising a coordination compound comprising:
- the metal, and
- at least one enaminolate ligand,
- thereby forming a layer comprising the metal on a portion of a surface of the substrate.
A system for depositing a material comprising a metal from group 4, group 5, group 6 or group 13 on a substrate, the system comprising:
- a reaction chamber for receiving the substrate,
- a first source for providing a vapor-phase composition comprising a precursor comprising a coordination compound, wherein the first source is in gas communication via a first valve with the reaction chamber, the coordination compound comprising:
- the metal, and
- at least one enaminolate ligand,
- a controller operably connected to the first valve, wherein the controller is configured and programmed to open the first valve to provide a flow of the composition into the reaction chamber and to close the first valve to cease the flow of the composition into the reaction chamber.
Dependencies are inferred from the claim text.