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US 2026/0152846 A1Published application
Deposition mask, method of manufacturing the same, and electronic device manufactured by using the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong Kuk KIM, Duck Jung LEE, Seung Hun KIM, Ji Hyun JUNG, Jun Ho JO
Life of this patent
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Abstract
A deposition mask includes a mask substrate having a cell opening, an intermediate inorganic film on the mask substrate and having an intermediate opening communicating with the cell opening, a mask alignment key on the intermediate inorganic film, and a membrane on the intermediate inorganic film and having a plurality of pixel openings communicating with the intermediate opening and a key opening exposing the mask alignment key.
Claims20
A deposition mask, comprising:
- a mask substrate having a cell opening;
- an intermediate inorganic film on the mask substrate and having an intermediate opening communicating with the cell opening;
- a mask alignment key on the intermediate inorganic film;
- and
- a membrane on the intermediate inorganic film and having:
- a plurality of pixel openings communicating with the intermediate opening;
- and
- a key opening exposing the mask alignment key.
5 more elements
A method, comprising:
- forming an intermediate inorganic film on a mask substrate;
- forming a membrane on the intermediate inorganic film;
- forming pixel openings and a key opening that expose the intermediate inorganic film by partially removing the membrane;
- forming a mask alignment key on a portion of the intermediate inorganic film exposed by the key opening;
- and
- forming a cell opening and an intermediate opening that expose the pixel openings by partially removing the mask substrate and the intermediate inorganic film,
- wherein the method is a method of manufacturing a deposition mask.
4 more elements
An electronic device comprising a display panel,
- wherein the display panel comprises a substrate and a plurality of light emitting layers formed on the substrate by utilizing a deposition mask, and
- the deposition mask comprises:
- a mask substrate having a cell opening;
- an intermediate inorganic film on the mask substrate and having an intermediate opening communicating with the cell opening;
- a mask alignment key on the intermediate inorganic film;
- and
- a membrane on the intermediate inorganic film and having:
- a plurality of pixel openings communicating with the intermediate opening;
- and
- a key opening exposing the mask alignment key.
7 more elements
Dependencies are inferred from the claim text.