Brazed joints and methods thereof
OwnerAngus McFadden, Freek Smits +2inventors
InventorsAngus McFadden, Freek Smits, Jason Wright, Kevin Brown
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Abstract
A brazed joint for process chamber components is provided by the technology described in the present application. The brazed joint is configured to withstand temperatures of 1000° C. or more. The brazed joint is formed between the surfaces of two process chamber components by placing a braze material between the two process chamber components. The braze material is a titanium and gold, a titanium and silver, or a combination thereof alloy. The braze material can be used with ceramic to ceramic joints as well as ceramic to metal joints. The ceramic material may be silicon nitride.
Claims20
An apparatus for a process chamber comprising:
- a first component where the first component is a first ceramic material that is configured to operate at temperatures greater than 1000° C.;
- a second component that is configured to operate at temperatures greater than 1000° C. spaced apart from the first component by a gap where the second component comprises a material selected from a group of materials consisting of:
- a second ceramic material, a metal material, or a combination thereof;
- and
- a braze having a melting point lower than the first component and the second component in the gap, wherein the braze comprises a titanium alloy.
An electrostatic chuck and pedestal assembly for a deposition process chamber comprising:
- an electrostatic chuck formed from at least one ceramic dielectric material;
- a pedestal formed from at least a second material and having a pedestal surface separated from an electrostatic chuck surface by a gap, wherein the second material is selected from a group of materials consisting of:
- a ceramic material, a metal material, or a combination thereof;
- and
- a braze having a melting point lower than the first component and the second component in the gap between the pedestal surface and the electrostatic chuck surface, wherein the braze is selected from a group of braze consisting of:
- titanium and gold, titanium and silver, or a combination thereof.
A method of forming a brazed joint configured to withstand temperatures of 1000° C., the method comprising:
- providing a first process chamber component formed, in part, by a ceramic material having a ceramic material surface and a second process chamber component having a second process chamber component surface separated from the ceramic material surface by a gap;
- placing a braze material comprising an alloy selected from the group of alloys consisting of titanium and gold, titanium and silver, or a combination thereof in the gap;
- melting the braze material until the braze material fills the gap;
- and
- cooling the braze material such that the first process chamber component is coupled to the second process chamber component by a brazed joint.
Dependencies are inferred from the claim text.