Device, a system, and a method for interferometry detection
AssigneeImec Vzw
InventorsJoonyoung KIM, Roelof JANSEN, Xavier ROTTENBERG, Pol VAN DORPE
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AssigneeImec Vzw
InventorsJoonyoung KIM, Roelof JANSEN, Xavier ROTTENBERG, Pol VAN DORPE
Estimating the term…
A device for interferometry detection comprises: a receiving unit configured to receive a reference beam and a response beam, based on a sample interacting with the sample beam to form the response beam carrying information of the sample; at least a first waveguide system configured to receive the reference beam and configured to transport the reference beam along different path lengths to a plurality of first outputs; a plurality of light sensors (configured to receive a combination of the reference beam and the response beam forming an interference of the reference beam and the response beam, wherein the plurality of light sensors are configured to simultaneously detect interference of the reference beam and the response beam corresponding to different path length relations between the reference beam and the response beam.
A device for interferometry detection, said device comprising:
A system for interferometry detection, said system comprising:
A method for interferometry detection, said method comprising:
Dependencies are inferred from the claim text.