US 2026/0150735 A1 · GLASS CORE FOR PACKAGING AND METHOD OF MANUFACTURING GLASS CORE FOR PACKAGING

Abstract

Embodiments relate to a glass core for packaging, a packaging substrate, and a method of manufacturing the glass core. A glass core for packaging comprises: plate glass having first and second surfaces facing each other; through-vias penetrating the plate glass in a thickness direction; and a cavity penetrating the first and second surfaces and allowing placement of a semiconductor element therein. The cavity provides a cavity space surrounded by a cavity inner wall, which is an inner wall surface connecting the first and second surfaces of the plate glass. A die block is disposed in the cavity space; the die block has a cavity die and a glass spacer vertically stacked. A distribution material is disposed between the cavity inner wall and the die block. The embodiments alleviate thickness mismatch when embedding a die in the cavity, improve workability and reliability.

Claims14

Dependent claims

A glass core for packaging comprising:

a plate glass having a first surface and a second surface facing each other;
through-vias penetrating the plate glass in a thickness direction;
and
a cavity penetrating the first and second surfaces and allowing a semiconductor element to be disposed therein,
wherein the cavity provides a cavity space surrounded by a cavity inner wall,
the cavity inner wall is an inner wall surface of the plate glass connecting the first and second surfaces of the plate glass,
a die block is disposed in the cavity space,
the die block has a cavity die, which is a die disposed in the cavity, and a glass spacer stacked vertically, and
a distribution material is disposed between the cavity inner wall and the die block.

6 more elements

A method of manufacturing a glass core for packaging comprising:

a placing operation of disposing, on a carrier, plate glass in which a cavity is arranged and a die block to obtain an assembly;
a dispensing operation of disposing a distribution material between a cavity inner wall of the assembly and the die block to prepare a fixed body;
and
a fixing operation of removing the carrier from the fixed body to obtain the glass core for packaging,
wherein the carrier detachably fixes positions of the plate glass and the die block,
the plate glass is a plate-shaped glass having a first surface and a second surface facing each other,
the plate glass comprises the cavity and through-vias,
the through-vias penetrate the plate glass in a thickness direction,
the cavity provides a cavity space surrounded by a cavity inner wall,
the cavity inner wall is an inner wall surface of the plate glass connecting the first and second surfaces of the plate glass,
the cavity space allows placement of a cavity die,
the cavity die is a die disposed in the cavity, and
the die block has the cavity die and a glass spacer stacked vertically.

10 more elements

Dependencies are inferred from the claim text.

Glass core for packaging and method of manufacturing glass core for packaging

Life of this patent

Glass core for packaging and method of manufacturing glass core for packaging

Life of this patent

Abstract

Claims14