Substrate storage container and lid thereof
AssigneeMiraial Co., Ltd.
InventorsRyuuji FUKUDA, Takuto SHIKA
Life of this patent
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AssigneeMiraial Co., Ltd.
InventorsRyuuji FUKUDA, Takuto SHIKA
Estimating the term…
A substrate storage container includes a container body and a lid having a seal member attachment portion and a periphery portion-opposing portion opposing the opening periphery portion. The lid further has a seal member attached to the seal member attachment portion. The seal member is interposed between the opening periphery portion and the periphery portion-opposing portion, and tightly abuts on the opening periphery portion and the periphery portion-opposing portion, thereby closing the container body opening portion. The seal member includes a base portion held by the seal member attachment portion; a periphery portion-abutting lip portion extending from the base portion and abutting on the opening periphery portion; and an opposing portion-abutting lip portion extending from the base portion and abutting on the periphery portion-opposing portion. The periphery portion-opposing portion has a cross-sectional shape indicating a placement target PT and not being a direct flat plane.
A substrate storing container comprising:
A lid of a substrate storing container, the substrate storing container including:
Dependencies are inferred from the claim text.