US 2026/0149436 A1Published application

Pulse laser power source, pulse laser device, and electronic device manufacturing method

AssigneeGigaphoton Inc.

InventorTakeshi UEYAMA

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Abstract

A pulse laser power source includes a step-up transformer in which a pulse current flows to a primary side, a first magnetic pulse compression circuit transferring charge of the first transfer capacitor to a second transfer capacitor, a second magnetic pulse compression circuit transferring charge of the second transfer capacitor to a peaking capacitor, a reset circuit including reset windings performing magnetic reset, and a series circuit of a resistor and an inductor connected in parallel to the peaking capacitor. A resistance value of the resistor is in a range of 100 to 1000Ω inclusive. An inductance L of the inductor satisfies ((ωL)2+R2)1/2>1/ωCp and L≤(1/Rep−Tm)×R/2, where a capacitance of the peaking capacitor is Cp, a resonance angular frequency during transfer of charge from the second transfer capacitor to the peaking capacitor is ω, a repetition frequency is Rep, and a required time for the magnetic reset is Tm.

Claims20

Dependent claims

A pulse laser power source, comprising:

a step-up transformer in which a pulse current from a main capacitor flows to a primary side;
a first magnetic pulse compression circuit including a first transfer capacitor connected to a secondary side of the step-up transformer and a first magnetic switch connected to the first transfer capacitor, and configured to transfer charge of the first transfer capacitor to a second transfer capacitor;
a second magnetic pulse compression circuit including the second transfer capacitor and a second magnetic switch connected to the second transfer capacitor, and configured to transfer charge of the second transfer capacitor to a peaking capacitor;
a reset circuit including reset windings that reversely excite cores of the step-up transformer, the first magnetic switch, and the second magnetic switch to perform magnetic reset;
and
a series circuit of a resistor and an inductor connected in parallel to the peaking capacitor,
a resistance value of the resistor being equal to or more than 100Ω and equal to or less than 1000Ω, and
an inductance L of the inductor satisfying two expressions of:
(
(
ω
⁢
L
)
2
+
R
2
)
1
/
2
>
1
/
ω
⁢
Cp
,
and
L
≤
(
1
/
Rep
-
Tm
)
×
R
/
2
,
where a capacitance of the peaking capacitor is Cp, a resonance angular frequency during transfer of charge from the second transfer capacitor to the peaking capacitor is ω, a repetition frequency is Rep, and a required time for the magnetic reset is Tm.

42 more elements

A pulse laser device comprising:

a step-up transformer in which a pulse current from a main capacitor flows to a primary side;
a first magnetic pulse compression circuit including a first transfer capacitor connected to a secondary side of the step-up transformer and a first magnetic switch connected to the first transfer capacitor, and configured to transfer charge of the first transfer capacitor to a second transfer capacitor;
a second magnetic pulse compression circuit including the second transfer capacitor and a second magnetic switch connected to the second transfer capacitor, and configured to transfer charge of the second transfer capacitor to a peaking capacitor;
a reset circuit including reset windings that reversely excite cores of the step-up transformer, the first magnetic switch, and the second magnetic switch to perform magnetic reset;
a series circuit of a resistor and an inductor connected in parallel to the peaking capacitor;
and
a laser chamber including a pair of electrodes arranged therein and connected to the peaking capacitor,
a resistance value of the resistor being equal to or more than 100Ω and equal to or less than 1000Ω, and
an inductance L of the inductor satisfying two expressions of:
(
(
ω
⁢
L
)
2
+
R
2
)
1
/
2
>
1
/
ω
⁢
Cp
,
and
L
≤
(
1
/
Rep
-
Tm
)
×
R
/
2
,
where a capacitance of the peaking capacitor is Cp, a resonance angular frequency during transfer of charge from the second transfer capacitor to the peaking capacitor is ω, a repetition frequency is Rep, and a required time for the magnetic reset is Tm.

43 more elements

An electronic device manufacturing method, comprising:

generating pulse laser light using a pulse laser device;
outputting the pulse laser light to an exposure apparatus;
and
exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
the pulse laser device including:
a step-up transformer in which a pulse current from a main capacitor flows to a primary side;
a first magnetic pulse compression circuit including a first transfer capacitor connected to a secondary side of the step-up transformer and a first magnetic switch connected to the first transfer capacitor, and configured to transfer charge of the first transfer capacitor to a second transfer capacitor;
a second magnetic pulse compression circuit including the second transfer capacitor and a second magnetic switch connected to the second transfer capacitor, and configured to transfer charge of the second transfer capacitor to a peaking capacitor;
a reset circuit including reset windings that reversely excite cores of the step-up transformer, the first magnetic switch, and the second magnetic switch to perform magnetic reset;
a series circuit of a resistor and an inductor connected in parallel to the peaking capacitor;
and
a laser chamber including a pair of electrodes arranged therein and connected to the peaking capacitor,
a resistance value of the resistor being equal to or more than 100Ω and equal to or less than 1000Ω, and
an inductance L of the inductor satisfying two expressions of:
(
(
ω
⁢
L
)
2
+
R
2
)
1
/
2
>
1
/
ω
⁢
Cp
,
and
L
≤
(
1
/
Rep
-
Tm
)
×
R
/
2
,
where a capacitance of the peaking capacitor is Cp, a resonance angular frequency during transfer of charge from the second transfer capacitor to the peaking capacitor is ω, a repetition frequency is Rep, and a required time for the magnetic reset is Tm.

48 more elements

Dependencies are inferred from the claim text.

Facts

Application: 19/348,385Filed 2 Oct 2025
Priority: JP 2024-20583226 Nov 2024
Published: 28 May 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

H03K 3/57
By the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not…: the…
H01S 3/08009
Incorporating a dispersive element, e.g. a prism for wavelength selection: using a diffraction grating
H01S 3/09702
By gas discharge of a gas laser: details of the driver electronics and electric discharge circuits
H01S 3/0975
By gas discharge of a gas laser: using inductive or capacitive excitation