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US 2026/0148926 A1Published application
Distributive imaging allowing sample relaxation
AssigneeFEI Company
InventorsOndrej Shánel, Miloš Malínský, Petr Strelec
Life of this patent
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Abstract
CPB images are acquired with pulsed exposures of fields of view (FOVs) defined in a region of interest of a sample. Multiple exposures are configured with a time interval greater than a phonon lifetime to reduce sample damage induced by the CPB exposure. FOVs can defined to be spaced apart to control effective irradiation dose based on a combination of direct exposure and evanescent exposure.
Claims21
A method, comprising:
- applying multiple CPB pulses to at least one field of view (FOV) defined in a region of interest (ROI) of a specimen, wherein the multiple CPB pulses are applied to the at least one FOV with a temporal separation based on an FOV relaxation time;
- and
- obtaining multiple FOV images of the at least one FOV, each FOV image corresponding to a respective CPB pulse of the multiple CPB pulses.
A method, comprising:
- repetitively exposing a FOV on a sample to CPB pulses, wherein the CPB pulses are temporally separated by an FOV relaxation time associated with recoverable sample damage;
- and
- imaging the FOV with an array detector defining a plurality of pixels, wherein the CPB pulses are configured so that a number of charged particles in an FOV area corresponding to a pixel in response to each of the CPB pulses is less than 10.
A CPB apparatus, comprising:
- a CPB source operable to produce multiple CPB pulses directed to each of a plurality of FOVs defined on a sample;
- and
- a CPB beam deflector situated to receive the CPB pulses from the CPB source and direct multiple CPB pulses to each of a plurality of FOVs, wherein the multiple CPB pulses applied to each FOV are temporally separated by at least a phonon lifetime associated with the sample.
A method, comprising:
- repetitively directing an electron beam to at least one field of view of a sample;
- and
- imaging the at least one field of view with an array detector that defines a plurality of pixels, wherein the electron beam is configured to effectively expose an FOV area associated with a pixel to no more than a selected number of electrons.
Dependencies are inferred from the claim text.