Transfer film, pattern forming method, laminate, and semiconductor package
AssigneeFUJIFILM Corporation
InventorKeigo Yamaguchi
Life of this patent
Estimating the term…
Loading patent…
AssigneeFUJIFILM Corporation
InventorKeigo Yamaguchi
Estimating the term…
An object of the present invention is to provide a transfer film capable of forming a film which contributes to suppressing migration between wirings. The transfer film of the present invention includes, in the following order, a temporary support, a water-soluble resin layer, and a photosensitive composition layer, in which the photosensitive composition layer contains at least one specific compound selected from the group consisting of a polyimide precursor, a polyimide, a polybenzoxazole precursor, a polybenzoxazole, a phenol resin, an epoxy resin, a polyphenylene ether resin, a silicone resin, a benzocyclobutene resin, a fluorene resin, a liquid crystal polymer, a polyethersulfone, a polyarylate, a polyetherimide, a polybenzimidazole, a polyphenylsulfone, a polycarbonate, an acrylonitrile-butadiene-styrene copolymer resin, and a polyphenylene sulfide.
A transfer film comprising, in the following order:
Dependencies are inferred from the claim text.