Piezoelectric high-pressure sensor
AssigneeKistler Holding AG
InventorsJulian Hoefler, Lukas Roth, Stefan Brechbuhl
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AssigneeKistler Holding AG
InventorsJulian Hoefler, Lukas Roth, Stefan Brechbuhl
Estimating the term…
A piezoresistive pressure sensor for measuring the pressure of a medium in an environment includes a housing defining an interior, a base body disposed in the interior and connected to the housing and defining a diaphragm, and a measuring unit with a piezoresistive element disposed in the interior so as to detect a deflection of the diaphragm. The diaphragm confines a blind hole of the base body and an opening through the housing is arranged to communicate with the blind hole when the piezoresistive pressure sensor is exposed to the medium so as to deflect the diaphragm. A material bonding connection connects the base body directly to the housing in a mechanically tight manner while exhibiting a melting temperature greater than or equal to 250° C. An electrical conductor taps the piezoresistive element's change in resistance as electrical voltage and discharges the voltage into the environment.
A piezoelectric high-pressure sensor for measuring a pressure of up to 10 kbar;
Dependencies are inferred from the claim text.