Magneto-optical chemical sensors for process chambers
AssigneeApplied Materials, Inc.
InventorTIMOTHY CHEN
Life of this patent
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Abstract
Magneto-optical sensors for process or process chamber condition monitoring are described. In an example, a system includes a process chamber. The system also includes a laser source to provide a laser beam having an initial polarization, the laser beam to be directed through a first polarizer and then into the process chamber. The system also includes a magnet surrounding the process chamber, the magnet to provide a Faraday rotation of the laser beam, the laser beam to exit the process chamber and enter a second polarizer and then a detector to provide a detected polarization rotation for lock-in detection.
Claims20
A system comprising:
- a process chamber;
- a laser source to provide a laser beam having an initial polarization, wherein the laser beam is directed through a first polarizer and then into the process chamber;
- a magnet surrounding the process chamber, wherein the magnet provides a Faraday rotation of the laser beam, the laser beam to exit the process chamber and enter a second polarizer;
- and
- a detector to detect a polarization rotation for lock-in detection.
A system comprising:
- a process chamber;
- a laser source to provide a laser beam having an initial polarization, wherein the laser beam is directed through a first polarizer and then into the process chamber;
- a magnet surrounding the process chamber, wherein the magnet provides a Faraday rotation of the laser beam, the laser beam to exit the process chamber and enter a second polarizer;
- and
- a detector to detect a polarization rotation, the detector to provide the detected polarization rotation to a lock-in amplifier.
A system including a magneto-optical sensor for a process, the system comprising:
- a process chamber;
- a laser source to provide a laser beam having an initial polarization, wherein the laser beam is directed through a first polarizer and then into the process chamber;
- a Helmholtz coil surrounding the process chamber, wherein the Helmholtz coil provides a Faraday rotation of the laser beam, the laser beam to exit the process chamber and enter a second polarizer;
- a detector to detect a polarization rotation, the detector to provide the detected polarization rotation to a lock-in amplifier.
Dependencies are inferred from the claim text.