Channel structure, fluid measurement apparatus, and fluid control apparatus
AssigneesIhara Science Corporation, HORIBA STEC, Co., Ltd.
InventorsMiyoshi KIMURA, Toru KISHI, Tadahiro YASUDA
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AssigneesIhara Science Corporation, HORIBA STEC, Co., Ltd.
InventorsMiyoshi KIMURA, Toru KISHI, Tadahiro YASUDA
Estimating the term…
The present invention fixes a fluidic resistor member while ensuring sealability, without applying unnecessary force thereto. The fluidic resistor member includes: pipe members each forming a channel; a fluidic resistor member that is made of ceramic, that is provided in the channel, and that has one or more resistor channels; and a fixing mechanism that fixes the fluidic resistor member to the channel by being nipped between the pipe members. The fixing mechanism includes a seal that provides sealing on an outer peripheral surface of the fluidic resistor member and a press-fixing portion that fixes the fluidic resistor member by pressing the outer peripheral surface of the fluidic resistor member. The seal and the press-fixing portion are provided at least at different positions in an axial direction of the fluidic resistor member.
A channel structure comprising:
A channel structure comprising:
Dependencies are inferred from the claim text.