Hydrostatic gas bearing device
AssigneeKYOCERA Corporation
InventorKoji AKASHI
Life of this patent
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Abstract
A hydrostatic gas bearing device according to the present disclosure includes a movable member and a fixed member. A recessed portion is located at a bearing surface of a base of the movable member or the fixed member, and an opening portion of a gas supply hole is located at a bottom surface of the recessed portion. A porous body serving as a gas ejection portion is located in the recessed portion while not protruding from the bearing surface. In a surface of the porous body, a first groove extending from a central region of the surface to an outer periphery of the porous body is located. A second groove communicating with the first groove is located in the bearing surface of the base.
Claims16
A hydrostatic gas bearing device, comprising:
- a movable member:
- and
- a fixed member,
- wherein a recessed portion is located at a bearing surface of a base of the movable member or the fixed member, and an opening portion of a gas supply hole is located at a bottom surface of the recessed portion,
- a porous body serving as a gas ejection portion is located in the recessed portion while not protruding from the bearing surface,
- in a surface of the porous body, a first groove extending from a central region of the surface to an outer periphery of the porous body is located, and
- a second groove communicating with the first groove is located in the bearing surface of the base.
Dependencies are inferred from the claim text.