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US 2026/0146190 A1Published application
Slurry composition for chemical mechanical polishing, polishing pad for chemical mechanical polishing, and semiconductor device manufacturing method using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSanghuck Jeon, Junghun Kim, Seonghwa Bae, Youngkwan Seo, Hojin Jeong
Life of this patent
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Abstract
A slurry composition including an abrasive particle is provided. The abrasive particle includes a core including a phase-change material that changes phase within a processing temperature range of a chemical mechanical polishing (CMP) process, and a shell including a material that is different from the phase-change material of the core and surrounding the core.
Claims26
A slurry composition comprising:
- an abrasive particle comprising a core comprising a phase-change material that exhibits a phase change within a processing temperature range of a chemical mechanical polishing (CMP) process;
- and
- a shell surrounding the core, the shell comprising a material that is different from the phase-change material of the core.
A polishing pad, comprising:
- a base;
- and
- an abrasive particle on a surface of the base, the abrasive particle comprising
- a core comprising a phase-change material that exhibits a phase change within a processing temperature range of a chemical mechanical polishing (CMP) process, and
- a shell surrounding the core, the shell comprising a material that is different from the phase-change material of the core.
2 more elements
A semiconductor device manufacturing method, comprising:
- forming an object to be polished on a substrate;
- and
- performing a chemical mechanical polishing (CMP) process using a slurry composition and a polishing pad to polish the object,
- wherein at least one of the slurry composition and the polishing pad comprises an abrasive particle, the abrasive particle comprising
- a core comprising a phase-change material that exhibits a phase change in a temperature range of about 30° C. to about 80° C., and
- a shell surrounding the core, the shell comprising a material that is different from the phase-change material of the core.
3 more elements
Dependencies are inferred from the claim text.