Xerogel titanium oxide thin film and method for manufacturing the same
AssigneeKorea Advanced Institute of Science and Technology
InventorGonu KIM
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Abstract
Provided are a method for manufacturing a titanium oxide (TiOx) thin film including: (S10) mixing a titanium precursor and a peroxide aqueous solution to prepare a gel mixture including a titanium oxide (TiOx); (S20) heating the gel mixture to prepare a titanium oxide (TiOx) gel from which a peroxotitanic acid precipitate, a peroxide, and water have been removed; (S30) preparing a dispersion in which the titanium oxide (TiOx) gel is dispersed in a solvent; (S40) applying the dispersion on a substrate; and (S50) heat treating the substrate on which the dispersion has been applied, and a titanium oxide (TiOx) thin film manufactured therefrom.
Claims11
A method for manufacturing a titanium oxide (TiOx) thin film, the method comprising:
- (S10) mixing a titanium precursor and a peroxide aqueous solution to prepare a gel mixture including a titanium oxide (TiOx);
- (S20) heating the gel mixture to prepare a titanium oxide (TiOx) gel from which a peroxotitanic acid precipitate, a peroxide, and water have been removed;
- (S30) preparing a dispersion in which the titanium oxide (TiOx) gel is dispersed in a solvent;
- (S40) applying the dispersion on a substrate;
- and
- (S50) heat treating the substrate on which the dispersion has been applied.
Dependencies are inferred from the claim text.