Fluid delivery module
AssigneeIchor Systems, Inc.
InventorMichael Vogtmann
Life of this patent
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Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow are formed with a variety of fluid flow components, including fluid flow components for mixing fluid flows. Fluid flow components for mixing flows utilize mixing elements configured to receive flows of two or more process fluid flows via fluid inlets, mix the fluid flow within the mixing element, and deliver mixed fluid to a down-stream fluid flow component or an outlet of an apparatus for controlling fluid flow.
Claims20
1-112. (canceled)
A fluid flow component, comprising:
- a component body;
- a plurality of input flow paths defined in the component body, wherein each input flow path comprises an input port;
- an outlet flow path defined in the component body, wherein the outlet flow path comprises an outlet port;
- a junction defined in the component body, wherein the junction connects the input flow paths and the outlet flow path;
- and
- a mixing element for mixing more than two fluids, wherein the mixing element is positioned in the junction, and wherein the mixing element comprises:
- a plurality of fluid inlets, wherein each fluid inlet is in communication with an input flow path;
- and
- a fluid outlet in communication with the outlet flow path.
Dependencies are inferred from the claim text.