Substrate structure
AssigneeUnimicron Technology Corp.
InventorsYu-Hua Chen, Ra-Min Tain
Life of this patent
Estimating the term…
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AssigneeUnimicron Technology Corp.
InventorsYu-Hua Chen, Ra-Min Tain
Estimating the term…
A substrate structure including a dielectric substrate, an adhesion promotion layer (APL), a conductive material, at least one dielectric layer and at least one pad. The dielectric substrate has an upper surface and a lower surface opposite to each other, and at least one through-hole passing through the dielectric substrate and connected to the upper surface and the lower surface. The APL is disposed on the upper surface, on the lower surface, and on an inner wall of the through-hole of the dielectric substrate. The conductive material fills the through-hole to define at least one conductive through-hole. The dielectric layer is disposed on the APL and has at least one opening exposing the conductive through-hole. A diameter of the opening is greater than a diameter of the conductive through-hole. The pad is disposed in the opening, extends onto the dielectric layer, and electrically connected to the conductive through-hole.
A substrate structure, comprising:
Dependencies are inferred from the claim text.