Composition, resist film, pattern forming method, and method for producing electronic device
AssigneeFUJIFILM Corporation
InventorsMasafumi Kojima, Akiyoshi Goto
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AssigneeFUJIFILM Corporation
InventorsMasafumi Kojima, Akiyoshi Goto
Estimating the term…
The present invention provides a composition from which a pattern having high resolution can be formed, and a resist film, a pattern forming method, and a method for producing an electronic device that are related to the composition. A composition according to the present invention includes a compound A having a plurality of groups represented by any one of formula (A1) to formula (A3), and a compound B having a plurality of specific functional groups selected from the group consisting of a nitrogen-containing aromatic heterocyclic group, —NH2, an NH2 group protected by a removable protecting group, —NHRN1 an NHRN1 group protected by a removable protecting group, —NRN22, —C≡N, —OH, —ORO, —SH, —SRS, —PRP12, and —P(ORP2)2. The composition satisfies at least one of requirement 1 or requirement 2.
A composition comprising:
Dependencies are inferred from the claim text.