Physical quantity sensor element and physical quantity sensor device
AssigneeSeiko Epson Corporation
InventorMasataka Kazuno
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorMasataka Kazuno
Estimating the term…
A physical quantity sensor element includes a beam fixer, a first electrode fixer, and a second electrode fixer, a support beam having one end coupled to the beam fixer and extending in a direction parallel to a support substrate, a movable body coupled to another end of the support beam and disposed on both sides with the support beam interposed therebetween in a plan view, a first movable comb electrode coupled to the movable body and disposed on one side with the support beam interposed therebetween in plan view, a first fixed comb electrode coupled to the first electrode fixer and facing the first movable comb electrode, a second movable comb electrode coupled to the movable body and disposed on another side with the support beam interposed therebetween in plan view, a second fixed comb electrode coupled to the second electrode fixer and facing the second movable comb electrode, and self-diagnosis electrodes interposing the first movable comb electrode, the first fixed comb electrode, the second movable comb electrode, and the second fixed comb electrode.
A physical quantity sensor element comprising:
Dependencies are inferred from the claim text.