Physical quantity sensor element and physical quantity sensor device

A physical quantity sensor element comprising:

• a first electrode fixing portion, a second electrode fixing portion, and a movable electrode fixing portion that extend in a direction orthogonal to a support substrate;
• a first fixed inter digital transducer coupled to the first electrode fixing portion and including a main body extending in a first direction parallel to the support substrate, and comb teeth extending in a second direction parallel to the support substrate and orthogonal to the first direction;
• a second fixed inter digital transducer coupled to the second electrode fixing portion and including a main body extending in the second direction, and comb teeth extending in the first direction;
• a first movable inter digital transducer coupled to the movable electrode fixing portion and arranged opposite to the first fixed inter digital transducer;
• and
• a second movable inter digital transducer coupled to the movable electrode fixing portion and arranged opposite to the second fixed inter digital transducer, wherein
• the first movable inter digital transducer and the second movable inter digital transducer have a same resonance frequency, and
• at time of self-diagnosis, a signal for displacing the first movable inter digital transducer and the second movable inter digital transducer and having a frequency equal to the resonance frequency is applied between the first movable inter digital transducer and the first fixed inter digital transducer and between the second movable inter digital transducer and the second fixed inter digital transducer.