X-ray fluorescence spectrometer

An X-ray fluorescence spectrometer, which includes:

• an irradiation chamber which is in a vacuum environment and in which an X-ray source configured to emit X-rays is to be arranged;
• and a sample chamber which is in an atmospheric pressure environment and in which a sample cell is to be arranged, the X-ray fluorescence spectrometer comprising:
• a window frame holding member, which forms a part of a partition wall between the irradiation chamber and the sample chamber, and includes an opening for allowing the X-rays to pass therethrough from the irradiation chamber to the sample chamber;
• and
• a window frame member, which is configured to hold a partition film, and is to be arranged in the opening of the window frame holding member, the partition film being formed from a material that transmits the X-rays, and forming another part of the partition wall,
• wherein the window frame holding member includes a film supporting member including a plurality of through holes for allowing the X-rays to pass therethrough, the film supporting member being arranged adjacent to the partition film on the irradiation chamber side of the partition film, and being configured to support the partition film from the irradiation chamber side, and
• wherein the window frame member includes:
• an inner film holding member having an annular shape, the inner film holding member including a peripheral wall extending from a proximal end to be arranged on the sample chamber side toward a distal end to be arranged on the irradiation chamber side, the distal end having an opening to be closed by a part of the partition film;
• and
• an outer film holding member having an annular shape, the outer film holding member being configured to be inserted from the distal end of the inner film holding member to be mounted to the proximal end of the inner film holding member so as to fix a surrounding of the part of the partition film to the inner film holding member.