Heating element for a substrate processing system

Abstract

The invention relates to a heating element, a substrate processing system comprising such a heating element, and a method for processing a substrate in such a substrate processing system. The heating element comprises an electrically conductive electrode, wherein the electrically conductive electrode extends along a path between an input contact and an output contact. The electrically conductive electrode comprises a segment along the path in which the electrically conductive electrode is split in at least two separate electrically conductive electrode branches which are electrically connected in parallel. The electrically conductive electrode and the at least two separate electrically conductive branches comprises a heating component which is configured for generating heat and/or emitting heat radiation when a current is running through the heating component.

Dependencies are inferred from the claim text.