Compressible seals with reduced compression requirements
AssigneeLam Research Corporation
InventorsSwajeeth Pilot Panchangam, Chetan Umaji Nayakawade, Nick Ray Linebarger, Jr., Sushanth Sunilkumar Shetty
Life of this patent
Estimating the term…
Abstract
This disclosure pertains to compressible metal seals that have cross-sectional shapes that include a circular exterior profile and a non-circular interior profile. Such seals may require lower compressive force compared to annular-shaped cross-sectional shapes for the same amount of compression and may also exhibit longer seal path lengths than annular-shaped cross-sectional shapes at equivalent amounts of compressive force.
Claims26
An apparatus comprising:
- a segment of compressible material, wherein:
- the segment of compressible material has a constant cross-sectional shape along a first path,
- the cross-sectional shape has an exterior profile and an interior profile,
- the exterior profile has a nominally circular shape of radius R,
- the interior profile has a non-circular shape with a maximum dimension along a first reference axis that intersects the interior profile at two locations,
- the interior profile has a transverse dimension along a second reference axis that is perpendicular to the first axis and positioned midway between the two locations where the first reference axis intersects the interior profile, and
- the maximum dimension is larger than the transverse dimension.
(canceled)
(canceled)
(canceled)
(canceled)
The apparatus of claim, 1 wherein the interior profile and the exterior profile are both closed profiles.
(canceled)
Dependencies are inferred from the claim text.