Apparatus for producing oxide single crystal, method for producing gallium oxide single crystals using the apparatus, and gallium oxide single crystal produced thereby
AssigneePusan National Univeristy Industry-University Cooperation Foundation
InventorsJong Mok OK, Byeongcheol CHOE, Sungkyun PARK, Younghyun LEE
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Abstract
An apparatus for producing an oxide single crystal, includes: a heat source unit 100 configured to melt oxide pellets; a growth unit 200 composed of a refractory material, which is a space for loading the oxide pellets and for growing an oxide single crystal; a driving unit 300 configured to move the entire growth unit in order to grow the oxide single crystal; and a measurement unit 400 configured to measure a temperature of the growth unit throughout a process of growing the oxide single crystal.
Claims10
An apparatus for producing an oxide single crystal, comprising:
- a heat source unit 100 configured to melt oxide pellets;
- a growth unit 200 composed of a refractory material, which is a space for loading the oxide pellets and for growing an oxide single crystal;
- a driving unit 300 configured to move the entire growth unit in order to grow the oxide single crystal;
- and
- a measurement unit 400 configured to measure a temperature of the growth unit throughout a process of growing the oxide single crystal.
A method for producing a gallium oxide single crystal, comprising:
- a sample preparation step (S1) of preparing gallium oxide pellets by processing gallium oxide powder;
- a growth preparation step (S2) of loading the gallium oxide powder pellets into an oxide single crystal production apparatus to create a growth atmosphere and preheating the pellets;
- and
- a single crystal growth step (S3) of growing a single crystal by driving a motor, thereby producing a gallium oxide single crystal.
Dependencies are inferred from the claim text.