Solar cell and fabrication method therefor, coating device and solar cell production system
AssigneeTongwei Solar (Chengdu) Co., Ltd.
InventorsChen WANG, Feng GU, Qian LONG
Life of this patent
Estimating the term…
Loading patent…
AssigneeTongwei Solar (Chengdu) Co., Ltd.
InventorsChen WANG, Feng GU, Qian LONG
Estimating the term…
A coating device includes a first physical vapor deposition chamber, a chemical vapor deposition chamber, and a second physical vapor deposition chamber. The first physical vapor deposition chamber is used to prepare the aforementioned first transparent conductive layer. The chemical vapor deposition chamber is in communication with the first physical vapor deposition chamber. The chemical vapor deposition chamber is used to prepare the aforementioned first interlayer film. The second physical vapor deposition chamber is in communication with the chemical vapor deposition chamber. The second physical vapor deposition chamber is used to prepare the aforementioned second transparent conductive layer.
A coating device for preparing a solar cell, comprising:
Dependencies are inferred from the claim text.