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US 2026/0138868 A1Published application
Micro-particle cleaning method for micro-electromechanical systems devices with movable surface structures
AssigneeLumentum Operations LLC
InventorsEdward WANG, Wenlin JIN, Michael MILLER, Dean FLOCKTON, Chi-li-ma HARNOLD, Parsoua ABEDINI SOHI
Life of this patent
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Abstract
A nozzle of a surface cleaning system includes one or more gas channels configured to direct a gas toward a target surface at a low angle relative to the target surface in order to dislodge particles from the target surface; and a vacuum channel configured to apply a vacuum to the target surface for vacuuming the particles away from the target surface.
Claims21
A surface cleaning system, comprising:
- one or more gas sources configured to provide a gas at one or more respective gas pressures;
- a vacuum source configured to provide a vacuum at a vacuum pressure;
- a nozzle comprising:
- one or more gas channels fluidly coupled to the one or more gas sources, the one or more gas channels configured to direct the gas toward a target surface at a low angle relative to the target surface in order to dislodge particles from the target surface;
- and
- a vacuum channel fluidly coupled to the vacuum source, the vacuum channel configured to apply the vacuum to the target surface for vacuuming the particles away from the target surface;
- a movement mechanism attached to the nozzle or to an object of the target surface, wherein the movement mechanism is configured to change a position of the nozzle relative to the target surface according to a two-dimensional pattern;
- and
- a control system configured to control the one or more respective gas pressures of the gas in each gas channel of the one or more gas channels, the vacuum pressure of the vacuum within the vacuum channel, and a movement of the nozzle or the object via the movement mechanism.
6 more elements
A nozzle of a surface cleaning system, the nozzle comprising:
- one or more gas channels configured to direct a gas toward a target surface at a low angle relative to the target surface in order to dislodge particles from the target surface;
- and
- a vacuum channel configured to apply a vacuum to the target surface for vacuuming the particles away from the target surface.
A method for cleaning a surface, the method comprising:
- injecting a gas into one or more gas channels of a nozzle;
- directing, at an exit of the nozzle, the gas toward a target surface at a low angle relative to the target surface in order to dislodge particles from the target surface;
- and
- applying, by a vacuum channel of the nozzle, a vacuum to the target surface for vacuuming the particles away from the target surface.
1 more element
Dependencies are inferred from the claim text.