Loudspeaker comprising a micro-electromechanical unit

Abstract

A loudspeaker device (200) is provided. The loudspeaker device (200) comprises a micro-electromechanical unit (100). The micro-electromechanical unit (100) comprises a diaphragm (10) having a planar extension. The diaphragm (10) comprises a semiconductor structure (20) comprising a first (22) and a second (24) layer, each layer extending in the planar extension. The first layer (22) comprises Al(1-x)Ga(x)N, wherein 0.2≤x≤0.4, and the second layer (24) comprises GaN. The diaphragm (10) is arranged to oscillate in an extension transverse to the planar extension to thereby generate sound waves. A calibrating weight (17) is arranged on a surface of the diaphragm (10). The micro-electromechanical unit (214) further comprises a support structure (30) supporting the diaphragm (10), an electrode arranged (50) on a surface of the diaphragm (10), and a resonant box.

Dependencies are inferred from the claim text.