Substrate conveyance method, substrate processing apparatus, article manufacturing method, and storage medium

Abstract

The present disclosure provides a substrate conveyance method in a substrate processing apparatus including a first mechanism configured to hold the substrate by a first method in a processing device configured to process a substrate, and a second mechanism configured to convey the substrate to the first mechanism while holding the substrate by a second method different from the first method, the method comprising: obtaining first information representing a shape of the substrate in a case where the first method is used; obtaining second information representing a shape of the substrate in a case where the second method is used; and conveying the substrate to the first mechanism via the second mechanism based on the first information and the second information.

Dependencies are inferred from the claim text.