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AssigneeHefei Navigation Microsystem Integration Co., Ltd.
InventorsDongdong GONG, Guoqian WANG, Tongzhou ZHAN, Yanli SHI
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Disclosed are a piezoelectric laminated structure and a manufacturing method therefor. The piezoelectric laminated structure includes a substrate, further including a deflection limiting layer, a piezoelectric layer and a structural layer, where the piezoelectric layer bends and deforms toward the substrate, and the structural layer bends and deforms toward the piezoelectric layer. The method includes: growing a deflection limiting layer on a substrate; sputter-growing a piezoelectric layer, where the piezoelectric layer bends and deforms toward the substrate, and the front face of the substrate deforms and bends toward a back face thereof. The structural layer is deposited on a PZT upper electrode, and the structural layer deforms and bends toward the piezoelectric layer. The structural layer and the substrate are patterned, to form a desired piezoelectric laminated structure. A residual stress and a vibrational stress in an effective working zone are superimposed, which improves device performance.
A piezoelectric laminated structure, comprising a substrate, wherein the substrate is provided with a front face and a back face opposite to each other, and further comprising a deflection limiting layer, a piezoelectric layer and a structural layer that are sequentially arranged on the front face of the substrate in a laminated manner, wherein the piezoelectric layer bends and deforms toward the substrate, and the structural layer bends and deforms toward the piezoelectric layer, such that an initial deflection of the piezoelectric laminated structure is negative, and a residual stress and a vibrational stress in an effective working zone of the piezoelectric laminated structure are superimposed.
Dependencies are inferred from the claim text.