Radiation detector, detection unit, radiation imaging system, and method for manufacturing detection unit
AssigneeCanon Kabushiki Kaisha
InventorsFUMIAKI MIZUTANI, ZEMPEI WADA, TAKANORI WATANABE
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Abstract
A radiation detector includes, in plan view, a first region including a pixel portion and configured to detect a radiation by the pixel portion including a plurality of pixels, a second region including a plurality of peripheral circuits, and a third region provided between the first region and the second region. A mark portion is disposed in the first region or the third region. The mark portion includes at least one of a first portion and a second portion. The first portion constitutes a surface layer of the radiation detector. The second portion is a portion of a lower layer adjacent to the first portion.
Claims19
A radiation detector comprising, in plan view:
- a first region including a pixel portion and configured to detect a radiation by the pixel portion, the pixel portion including a plurality of pixels;
- a second region including a plurality of peripheral circuits;
- and
- a third region provided between the first region and the second region,
- wherein a mark portion is disposed in the first region or the third region, and
- wherein the mark portion includes at least one of a first portion and a second portion, the first portion constituting a surface layer of the radiation detector, the second portion being a portion of a lower layer adjacent to the first portion.
Dependencies are inferred from the claim text.