Piezoelectric microelectromechanical device with embossed cantilever regions

A method of fabricating a microelectromechanical system (MEMS) transducer, comprising:

• forming a protective layer over a substrate;
• etching a first region from the protective layer, wherein the first region corresponds to an embossed structure associated with a piezoelectric cantilever;
• forming a plurality of conductive layers and at least one piezoelectric layer between the plurality of conductive layers, wherein at least one electrode is formed at opposing surfaces of the at least one piezoelectric layer;
• and
• forming a cavity in the substrate, wherein the piezoelectric cantilever is disposed over the cavity and is configured to respond to acoustic signals applied to the piezoelectric cantilever, and wherein the embossed structure increases rigidity of the piezoelectric cantilever to transfer applied stress to the at least one electrode.