Optical devices and methods of manufacture
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsZi-Jheng Liu, Chiahung Liu, Ming-Fa Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsZi-Jheng Liu, Chiahung Liu, Ming-Fa Chen
Estimating the term…
A method of manufacturing an optical device that can include forming a plurality of first metal structures on a first region of a base surface of a die and a second metal structure on a second region of the base surface of the die, wherein the second metal structure has a different shape compared to the at least the first metal structure, and the second metal structure has a bar-type shape. The method can further include bonding the die to a supporting substrate through the plurality of the first metal structures, and applying an underfill material between the base surface of the die and the supporting substrate. In some embodiments, in a cross-sectional view, the underfill material extends from a top surface of the supporting substrate to a sidewall of the die.
A method of manufacturing an optical device, the method comprising:
An optical device comprising:
An optical device comprising:
Dependencies are inferred from the claim text.